====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     2.E+04 A   Layer # 1- Density = 9.127E22 atoms/cm3 = 8.895 g/cm3
  Layer # 1- Ni = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1001.00
 Ion Average Range =   129.2E+02 A   Straggling =   239.9E+01 A
 Ion Lateral Range =   216.3E+01 A   Straggling =   272.6E+01 A
 Ion Radial  Range =   340.2E+01 A   Straggling =   179.8E+01 A
====================================================================
 Range Skewne- = -001.1547  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 004.9800  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Ni    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
200010.E-03  0.0000E+00  3.4656E+07
400010.E-03  0.0000E+00  5.2407E+07
600010.E-03  0.0000E+00  5.4944E+07
800010.E-03  0.0000E+00  5.9007E+07
100001.E-02  0.0000E+00  6.4447E+07
120001.E-02  4.9950E+02  6.8424E+07
140001.E-02  0.0000E+00  5.9164E+07
160001.E-02  0.0000E+00  6.1216E+07
180001.E-02  0.0000E+00  5.7923E+07
200001.E-02  0.0000E+00  5.3403E+07
220001.E-02  4.9950E+02  5.6115E+07
240001.E-02  4.9950E+02  6.4412E+07
260001.E-02  4.9950E+02  6.6356E+07
280001.E-02  0.0000E+00  6.7695E+07
300001.E-02  0.0000E+00  6.3554E+07
320001.E-02  0.0000E+00  7.4002E+07
340001.E-02  4.9950E+02  8.0851E+07
360001.E-02  0.0000E+00  8.1898E+07
380001.E-02  0.0000E+00  9.2003E+07
400001.E-02  0.0000E+00  8.5584E+07
420001.E-02  4.9950E+02  7.3972E+07
440001.E-02  9.9900E+02  8.2082E+07
460001.E-02  0.0000E+00  8.3928E+07
480001.E-02  1.9980E+03  9.0815E+07
500001.E-02  4.9950E+02  8.4790E+07
520001.E-02  0.0000E+00  9.2590E+07
540001.E-02  1.9980E+03  9.7788E+07
560001.E-02  0.0000E+00  9.2286E+07
580001.E-02  4.9950E+02  9.6266E+07
600001.E-02  9.9900E+02  9.9158E+07
620001.E-02  4.9950E+02  1.0701E+08
640001.E-02  1.4985E+03  1.0996E+08
660001.E-02  4.9950E+02  1.1514E+08
680001.E-02  2.4975E+03  1.1770E+08
700001.E-02  1.9980E+03  1.1899E+08
720001.E-02  1.4985E+03  1.2013E+08
740001.E-02  1.4985E+03  1.2141E+08
760001.E-02  9.9900E+02  1.2649E+08
780001.E-02  1.4985E+03  1.2366E+08
800001.E-02  1.9980E+03  1.3839E+08
820001.E-02  0.0000E+00  1.4201E+08
840001.E-02  1.9980E+03  1.3965E+08
860001.E-02  4.9950E+02  1.5849E+08
880001.E-02  2.4975E+03  1.4439E+08
900001.E-02  1.9980E+03  1.6536E+08
920001.E-02  4.4955E+03  1.7373E+08
940001.E-02  4.4955E+03  1.5579E+08
960001.E-02  4.9950E+03  1.6341E+08
980001.E-02  3.4965E+03  1.6865E+08
100000.E-01  4.4955E+03  1.8258E+08
102000.E-01  4.4955E+03  1.8794E+08
104000.E-01  5.4945E+03  1.9097E+08
106000.E-01  6.9930E+03  1.8324E+08
108000.E-01  6.4935E+03  1.9745E+08
110000.E-01  4.4955E+03  1.9828E+08
112000.E-01  1.0989E+04  2.1317E+08
114000.E-01  1.1988E+04  2.1972E+08
116000.E-01  1.2488E+04  2.0966E+08
118000.E-01  1.1988E+04  2.2537E+08
120000.E-01  1.0989E+04  2.0860E+08
122000.E-01  1.1988E+04  2.1774E+08
124000.E-01  1.5485E+04  2.2256E+08
126000.E-01  1.4985E+04  2.0381E+08
128000.E-01  1.8482E+04  2.2092E+08
130000.E-01  1.7483E+04  2.0986E+08
132000.E-01  2.1479E+04  1.9668E+08
134000.E-01  2.3477E+04  1.9058E+08
136000.E-01  2.1479E+04  1.9505E+08
138000.E-01  1.7483E+04  1.6975E+08
140000.E-01  1.8981E+04  1.5225E+08
142000.E-01  1.8482E+04  1.6001E+08
144000.E-01  1.6484E+04  1.2751E+08
146000.E-01  2.3477E+04  1.2174E+08
148000.E-01  2.3477E+04  1.1474E+08
150000.E-01  1.6983E+04  9.7100E+07
152000.E-01  1.4985E+04  6.7446E+07
154000.E-01  1.2488E+04  5.2935E+07
156000.E-01  6.9930E+03  3.8018E+07
158000.E-01  9.4905E+03  3.1522E+07
160000.E-01  6.9930E+03  2.7419E+07
162000.E-01  5.4945E+03  2.1512E+07
164000.E-01  6.4935E+03  2.1619E+07
166000.E-01  6.4935E+03  1.6780E+07
168000.E-01  4.9950E+03  9.0360E+06
170000.E-01  9.9900E+02  3.4933E+06
172000.E-01  9.9900E+02  2.7501E+06
174000.E-01  1.4985E+03  3.9755E+06
176000.E-01  1.9980E+03  4.9757E+06
178000.E-01  4.9950E+02  5.5196E+05
180000.E-01  0.0000E+00  0.0000E+00
182000.E-01  0.0000E+00  0.0000E+00
184000.E-01  0.0000E+00  0.0000E+00
186000.E-01  0.0000E+00  0.0000E+00
188000.E-01  0.0000E+00  0.0000E+00
190000.E-01  0.0000E+00  0.0000E+00
192000.E-01  0.0000E+00  0.0000E+00
194000.E-01  0.0000E+00  0.0000E+00
196000.E-01  0.0000E+00  0.0000E+00
198000.E-01  0.0000E+00  0.0000E+00
200000.E-01  0.0000E+00  0.0000E+00
